Documents publiés en "1998"

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Beaudoin, F., Meunier, M., Simard-Normandin, M., & Landheer, D. (1998). Excimer Laser Cleaning of Silicon Wafer Backside Metallic Particles. Journal of vacuum science and technology. A, Vacuum, surfaces, and films, 16(3), 1976-1979. Lien externe

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Meunier, M., Boughaba, S., Wu, X., Beaudoin, F., Sacher, E., & Simard-Normandin, M. (janvier 1998). Laser cleaning for microelectronics [Communication écrite]. 5th ACS Congress of North America. Non disponible

Meunier, M., Izquierdo, R., Hasnaoui, L., Quenneville, E., Ivanov, D., Girard, F., Morin, F., Yelon, A., & Paleologou, M. (1998). Pulsed Laser Deposition of Superionic Ceramic Thin Films: Deposition and Applications in Electrochemistry. Applied Surface Science, 129, 466-470. Lien externe

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Popovici, D., Czeremuzkin, G., Meunier, M., & Sacher, E. (1998). Laser-Induced Metal-Organic Chemical Vapor Deposition (MOCVD) of Cu(hfac)(TMVS) on Amorphous Teflon AF1600: an XPS Study of the Interface. Applied Surface Science, 126(3-4), 198-204. Lien externe

Popovici, D., Meunier, M., & Sacher, E. (janvier 1998). Surface modification of teflon AF1600 for enhanced adhesion [Communication écrite]. 21st Annual Meeting of the Adhesion Society. Non disponible

Popovici, D., Piyakis, K., Meunier, M., & Sacher, E. (1998). Angle-resolved x-ray photoelectron spectroscopy comparison of copper/Teflon AF1600 and aluminum/Kapton metal diffusion. Journal of Applied Physics, 83(1), 108-111. Lien externe

Popovici, D., Sacher, E., & Meunier, M. (1998). Photodegradation of Teflon AF1600 During XPS Analysis. Journal of Applied Polymer Science, 70(6), 1201-1207. Lien externe

Popovici, D., Sacher, E., Meunier, M., Leonard, D., & Bertrand, P. Spontaneous reaction of Cu (hfac) (TMVS) vapor with Dupont Teflon AF1600 [Communication écrite]. Metallized plastics 5 & 6: fundamental and applied aspects. (5th conference held May 5-19, 1996 in Los Angeles and the 6th conference held Aug. 31-Sept. 5, 1997 in Paris). Lien externe

Popovici, D., Sapieha, J.-E., Czeremuszkin, G., Alptekin, A., Martinu, L., Meunier, M., & Sacher, E. The deposition of copper onto Teflon AF1600: an XPS comparison of vapor deposition and sputtering [Communication écrite]. Metallized Plastics 5 & 6: Fundamental and Applied Aspects. (5th Conference held May 5-19, 1996 in Los Angeles and the 6th Conference held Aug. 31-Sept. 5, 1997 in Paris). Lien externe

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Simard-Normandin, M., Beaudoin, F., & Meunier, M. (avril 1998). Metallic contamination from particles on the backside of wafers [Communication écrite]. 6th Symposium on particles on surfaces: Detection, Adhesion, Removal, Dallas, TX. Lien externe

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Wu, X., Meunier, M., & Sacher, E. (janvier 1998). Excimer laser-induced removal of particles from silison surfaces: effects of photoacoustic waves [Communication écrite]. 21st Annual Meeting of the Adhesion Society. Non disponible