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Laser cleaning for microelectronics

Michel Meunier, S. Boughaba, X. Wu, F. Beaudoin, Edward Sacher and M. Simard-Normandin

Paper (1998)

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Additional Information: Nom historique du département: Département de génie physique et de génie des matériaux
Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/29477/
Conference Title: 5th ACS Congress of North America
Conference Date(s): 1998-01-01 - 1998-12-31
Date Deposited: 18 Apr 2023 15:23
Last Modified: 05 Apr 2024 11:18
Cite in APA 7: Meunier, M., Boughaba, S., Wu, X., Beaudoin, F., Sacher, E., & Simard-Normandin, M. (1998, January). Laser cleaning for microelectronics [Paper]. 5th ACS Congress of North America.

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