F. Beaudoin, Michel Meunier
, M. Simard-Normandin and D. Landheer
Article (1998)
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| Additional Information: | Nom historique du département: Département de génie physique et de génie des matériaux |
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| Department: | Department of Engineering Physics |
| Research Center: | GCM - Thin Film Physics and Technology Research Group |
| PolyPublie URL: | https://publications.polymtl.ca/29865/ |
| Journal Title: | Journal of vacuum science and technology. A, Vacuum, surfaces, and films (vol. 16, no. 3) |
| Publisher: | American Vacuum Society |
| DOI: | 10.1116/1.581206 |
| Official URL: | https://doi.org/10.1116/1.581206 |
| Date Deposited: | 18 Apr 2023 15:22 |
| Last Modified: | 08 Apr 2025 02:20 |
| Cite in APA 7: | Beaudoin, F., Meunier, M., Simard-Normandin, M., & Landheer, D. (1998). Excimer Laser Cleaning of Silicon Wafer Backside Metallic Particles. Journal of vacuum science and technology. A, Vacuum, surfaces, and films, 16(3), 1976-1979. https://doi.org/10.1116/1.581206 |
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