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Excimer Laser Cleaning of Silicon Wafer Backside Metallic Particles

F. Beaudoin, Michel Meunier, M. Simard-Normandin and D. Landheer

Article (1998)

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Additional Information: Nom historique du département: Département de génie physique et de génie des matériaux
Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/29865/
Journal Title: Journal of vacuum science and technology. A, Vacuum, surfaces, and films (vol. 16, no. 3)
Publisher: American Vacuum Society
DOI: 10.1116/1.581206
Official URL: https://doi.org/10.1116/1.581206
Date Deposited: 18 Apr 2023 15:22
Last Modified: 05 Apr 2024 11:18
Cite in APA 7: Beaudoin, F., Meunier, M., Simard-Normandin, M., & Landheer, D. (1998). Excimer Laser Cleaning of Silicon Wafer Backside Metallic Particles. Journal of vacuum science and technology. A, Vacuum, surfaces, and films, 16(3), 1976-1979. https://doi.org/10.1116/1.581206

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