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Beaudoin, F., Meunier, M., Simard-Normandin, M., & Landheer, D. (1998). Excimer Laser Cleaning of Silicon Wafer Backside Metallic Particles. Journal of vacuum science and technology. A, Vacuum, surfaces, and films, 16(3), 1976-1979. Lien externe
Meunier, M., Boughaba, S., Wu, X., Beaudoin, F., Sacher, E., & Simard-Normandin, M. (janvier 1998). Laser cleaning for microelectronics [Communication écrite]. 5th ACS Congress of North America. Non disponible
Simard-Normandin, M., Beaudoin, F., & Meunier, M. (avril 1998). Metallic contamination from particles on the backside of wafers [Communication écrite]. 6th Symposium on particles on surfaces: Detection, Adhesion, Removal, Dallas, TX. Lien externe
