<  Back to the Polytechnique Montréal portal

Metallic contamination from particles on the backside of wafers

M. Simard-Normandin, F. Beaudoin and Michel Meunier

Paper (1998)

An external link is available for this item
Additional Information: Nom historique du département: Département de génie physique et de génie des matériaux
Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/28584/
Conference Title: 6th Symposium on particles on surfaces: Detection, Adhesion, Removal
Conference Location: Dallas, TX
Conference Date(s): 1998-04-01 - 1998-04-03
Official URL: https://books.google.ca/books?id=oaVM2CXi9IUC
Date Deposited: 18 Apr 2023 15:23
Last Modified: 05 Apr 2024 11:16
Cite in APA 7: Simard-Normandin, M., Beaudoin, F., & Meunier, M. (1998, April). Metallic contamination from particles on the backside of wafers [Paper]. 6th Symposium on particles on surfaces: Detection, Adhesion, Removal, Dallas, TX. https://books.google.ca/books?id=oaVM2CXi9IUC

Statistics

Stats are not available on this system.

Repository Staff Only

View Item View Item