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Excimer laser-induced removal of particles from silison surfaces: effects of photoacoustic waves

X. Wu, Michel Meunier and Edward Sacher

Paper (1998)

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Additional Information: Nom historique du département: Département de génie physique et de génie des matériaux
Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/29240/
Conference Title: 21st Annual Meeting of the Adhesion Society
Conference Date(s): 1998-01-01 - 1998-12-31
Date Deposited: 18 Apr 2023 15:23
Last Modified: 05 Apr 2024 11:17
Cite in APA 7: Wu, X., Meunier, M., & Sacher, E. (1998, January). Excimer laser-induced removal of particles from silison surfaces: effects of photoacoustic waves [Paper]. 21st Annual Meeting of the Adhesion Society.

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