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Items where Author is "Hallil, A."

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Number of items: 3.

Article

Hallil, A., Zabeida, O., Wertheimer, M. R., & Martinu, L. (2000). Mass-Resolved Ion Energy Distributions in Continuous Dual Mode Microwave/Radio Frequency Plasmas in Argon and Nitrogen. Journal of vacuum science and technology. A, Vacuum, surfaces, and films, 18(3), 882-890. External link

Zabeida, O., Hallil, A., Wertheimer, M. R., & Martinu, L. (2000). Time-Resolved Measurements of Ion Energy Distributions in Dual- Mode Pulsed-Microwave/Radio Frequency Plasma. Journal of Applied Physics, 88(2), 635-642. External link

Paper

Hallil, A., Zabeida, O., Sapieha, J.-E., Wertheimer, M. R., & Martinu, L. Mass resolved ion energy distributions in dual-mode microwave/radio frequency plasma [Paper]. Annual Technical Conference of the Society of Vacuum Coaters. External link

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