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Time-Resolved Measurements of Ion Energy Distributions in Dual- Mode Pulsed-Microwave/Radio Frequency Plasma

O. Zabeida, A. Hallil, Michael R. Wertheimer and Ludvik Martinu

Article (2000)

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Additional Information: Nom historique du département: Département de génie physique et de génie des matériaux
Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/27718/
Journal Title: Journal of Applied Physics (vol. 88, no. 2)
Publisher: American Institute of Physics
DOI: 10.1063/1.373714
Official URL: https://doi.org/10.1063/1.373714
Date Deposited: 18 Apr 2023 15:22
Last Modified: 05 Apr 2024 11:15
Cite in APA 7: Zabeida, O., Hallil, A., Wertheimer, M. R., & Martinu, L. (2000). Time-Resolved Measurements of Ion Energy Distributions in Dual- Mode Pulsed-Microwave/Radio Frequency Plasma. Journal of Applied Physics, 88(2), 635-642. https://doi.org/10.1063/1.373714

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