O. Zabeida, A. Hallil, Michael R. Wertheimer
and Ludvik Martinu
Article (2000)
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| Additional Information: | Nom historique du département: Département de génie physique et de génie des matériaux |
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| Department: | Department of Engineering Physics |
| PolyPublie URL: | https://publications.polymtl.ca/27718/ |
| Journal Title: | Journal of Applied Physics (vol. 88, no. 2) |
| Publisher: | American Institute of Physics |
| DOI: | 10.1063/1.373714 |
| Official URL: | https://doi.org/10.1063/1.373714 |
| Date Deposited: | 18 Apr 2023 15:22 |
| Last Modified: | 25 Sep 2024 16:08 |
| Cite in APA 7: | Zabeida, O., Hallil, A., Wertheimer, M. R., & Martinu, L. (2000). Time-Resolved Measurements of Ion Energy Distributions in Dual- Mode Pulsed-Microwave/Radio Frequency Plasma. Journal of Applied Physics, 88(2), 635-642. https://doi.org/10.1063/1.373714 |
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