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Mass resolved ion energy distributions in dual-mode microwave/radio frequency plasma

A. Hallil, O. Zabeida, Jolanta-Ewa Sapieha, Michael R. Wertheimer and Ludvik Martinu

Paper (1999)

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Additional Information: Nom historique du département: Département de génie physique et de génie des matériaux
Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/28909/
Conference Title: Annual Technical Conference of the Society of Vacuum Coaters
Official URL: https://www.svc.org/clientuploads/directory/resour...
Date Deposited: 18 Apr 2023 15:22
Last Modified: 05 Apr 2024 11:17
Cite in APA 7: Hallil, A., Zabeida, O., Sapieha, J.-E., Wertheimer, M. R., & Martinu, L. Mass resolved ion energy distributions in dual-mode microwave/radio frequency plasma [Paper]. Annual Technical Conference of the Society of Vacuum Coaters. https://www.svc.org/clientuploads/directory/resource_library/99_311.pdf

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