A. Hallil, O. Zabeida, Jolanta-Ewa Sapieha
, Michael R. Wertheimer and Ludvik Martinu
Paper (1999)
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| Additional Information: | Nom historique du département: Département de génie physique et de génie des matériaux |
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| Department: | Department of Engineering Physics |
| PolyPublie URL: | https://publications.polymtl.ca/28909/ |
| Conference Title: | Annual Technical Conference of the Society of Vacuum Coaters |
| Official URL: | https://www.svc.org/clientuploads/directory/resour... |
| Date Deposited: | 18 Apr 2023 15:22 |
| Last Modified: | 25 Sep 2024 16:10 |
| Cite in APA 7: | Hallil, A., Zabeida, O., Sapieha, J.-E., Wertheimer, M. R., & Martinu, L. Mass resolved ion energy distributions in dual-mode microwave/radio frequency plasma [Paper]. Annual Technical Conference of the Society of Vacuum Coaters. https://www.svc.org/clientuploads/directory/resource_library/99_311.pdf |
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