<  Back to the Polytechnique Montréal portal

Items where Author is "Hallil, A."

Up a level
Export as [feed] Atom [feed] RSS 1.0 [feed] RSS 2.0
Group by: Authors | Publication Date | Document subtype | No Grouping
Jump to: 2000 | 1999
Number of items: 3.

2000

Hallil, A., Zabeida, O., Wertheimer, M. R., & Martinu, L. (2000). Mass-Resolved Ion Energy Distributions in Continuous Dual Mode Microwave/Radio Frequency Plasmas in Argon and Nitrogen. Journal of vacuum science and technology. A, Vacuum, surfaces, and films, 18(3), 882-890. External link

Zabeida, O., Hallil, A., Wertheimer, M. R., & Martinu, L. (2000). Time-Resolved Measurements of Ion Energy Distributions in Dual- Mode Pulsed-Microwave/Radio Frequency Plasma. Journal of Applied Physics, 88(2), 635-642. External link

1999

Hallil, A., Zabeida, O., Sapieha, J.-E., Wertheimer, M. R., & Martinu, L. Mass resolved ion energy distributions in dual-mode microwave/radio frequency plasma [Paper]. Annual Technical Conference of the Society of Vacuum Coaters. External link

List generated on: Thu Jul 18 09:12:39 2024 EDT