A. Hallil, O. Zabeida, Michael R. Wertheimer
and Ludvik Martinu
Article (2000)
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| Additional Information: | Nom historique du département: Département de génie physique et de génie des matériaux |
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| Department: | Department of Engineering Physics |
| Research Center: | GCM - Thin Film Physics and Technology Research Group |
| PolyPublie URL: | https://publications.polymtl.ca/28134/ |
| Journal Title: | Journal of vacuum science and technology. A, Vacuum, surfaces, and films (vol. 18, no. 3) |
| Publisher: | American Vacuum Society |
| DOI: | 10.1116/1.582271 |
| Official URL: | https://doi.org/10.1116/1.582271 |
| Date Deposited: | 18 Apr 2023 15:21 |
| Last Modified: | 08 Apr 2025 02:17 |
| Cite in APA 7: | Hallil, A., Zabeida, O., Wertheimer, M. R., & Martinu, L. (2000). Mass-Resolved Ion Energy Distributions in Continuous Dual Mode Microwave/Radio Frequency Plasmas in Argon and Nitrogen. Journal of vacuum science and technology. A, Vacuum, surfaces, and films, 18(3), 882-890. https://doi.org/10.1116/1.582271 |
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