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Mass-Resolved Ion Energy Distributions in Continuous Dual Mode Microwave/Radio Frequency Plasmas in Argon and Nitrogen

A. Hallil, O. Zabeida, Michael R. Wertheimer and Ludvik Martinu

Article (2000)

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Additional Information: Nom historique du département: Département de génie physique et de génie des matériaux
Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/28134/
Journal Title: Journal of vacuum science and technology. A, Vacuum, surfaces, and films (vol. 18, no. 3)
Publisher: American Vacuum Society
DOI: 10.1116/1.582271
Official URL: https://doi.org/10.1116/1.582271
Date Deposited: 18 Apr 2023 15:21
Last Modified: 05 Apr 2024 11:16
Cite in APA 7: Hallil, A., Zabeida, O., Wertheimer, M. R., & Martinu, L. (2000). Mass-Resolved Ion Energy Distributions in Continuous Dual Mode Microwave/Radio Frequency Plasmas in Argon and Nitrogen. Journal of vacuum science and technology. A, Vacuum, surfaces, and films, 18(3), 882-890. https://doi.org/10.1116/1.582271

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