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Items where Author is "Haggerty, J. S."

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Number of items: 6.

A

Allen, S. D., Flint, J. H., Meunier, M., Adler, D., & Haggerty, J. S. (1984, January). A-S:H films produced from laser heated gases: Process characteristics and film properties [Paper]. Laser-Assisted Deposition, Etching, and Doping, Los Angeles, Calif.. External link

B

Branz, H. M., Meunier, M., Fan, S., Flint, J. H., & Haggerty, J. S. (1985, October). Hydrogenated amorphous silicon prepared by laser-induced chemical vapor deposition of silane for solar-cell applications [Paper]. 18th Photovoltaic Specialists Conference, Las Vegas, NV. External link

G

Gattuso, T. R., Meunier, M., Adler, D., & Haggerty, J. S. (1982, November). IR laser-induced deposition of silicon thin films [Paper]. 1982 MRS Fall Meeting, Boston, Massachusetts. Published in MRS Proceedings, 17. External link

M

Meunier, M., Flint, J. H., Haggerty, J. S., & Adler, D. (1987). Laser-induced chemical vapor deposition of hydrogenated amorphous silicon. I. Gas-phase process model. Journal of Applied Physics, 62(7), 2812-2812. External link

Meunier, M., Gattuso, T. R., Adler, D., & Haggerty, J. S. (1983). Hydrogenated amorphous silicon produced by laser induced chemical vapor deposition of silane. Applied Physics Letters, 43(3), 273-273. External link

Meunier, M., Flint, J. H., Adler, D., & Haggerty, J. S. (1983, November). A model for the laser-induced chemical vapor deposition of hydrogenated amorphous silicon [Paper]. Laser-Controlled Chemical Processing of Surfaces, MRS Fall Meeting, Boston, Massachusetts. Published in MRS Proceedings, 29. External link

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