Michel Meunier
, John H. Flint, David Adler and J. S. Haggerty
Paper (1983)
Document published while its authors were not affiliated with Polytechnique Montréal
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| PolyPublie URL: | https://publications.polymtl.ca/35789/ |
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| Conference Title: | Laser-Controlled Chemical Processing of Surfaces, MRS Fall Meeting |
| Conference Location: | Boston, Massachusetts |
| Conference Date(s): | 1983-11-14 - 1983-11-17 |
| Journal Title: | MRS Proceedings (vol. 29) |
| Publisher: | Materials Research Society |
| DOI: | 10.1557/proc-29-397 |
| Official URL: | https://doi.org/10.1557/proc-29-397 |
| Date Deposited: | 18 Apr 2023 15:26 |
| Last Modified: | 08 Apr 2025 06:57 |
| Cite in APA 7: | Meunier, M., Flint, J. H., Adler, D., & Haggerty, J. S. (1983, November). A model for the laser-induced chemical vapor deposition of hydrogenated amorphous silicon [Paper]. Laser-Controlled Chemical Processing of Surfaces, MRS Fall Meeting, Boston, Massachusetts. Published in MRS Proceedings, 29. https://doi.org/10.1557/proc-29-397 |
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