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IR laser-induced deposition of silicon thin films

T. R. Gattuso, Michel Meunier, David Adler and J. S. Haggerty

Paper (1982)

Document published while its authors were not affiliated with Polytechnique Montréal

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PolyPublie URL: https://publications.polymtl.ca/35732/
Conference Title: 1982 MRS Fall Meeting
Conference Location: Boston, Massachusetts
Conference Date(s): 1982-11-01 - 1982-11-04
Journal Title: MRS Proceedings (vol. 17)
Publisher: Materials Research Society
DOI: 10.1557/proc-17-215
Official URL: https://doi.org/10.1557/proc-17-215
Date Deposited: 18 Apr 2023 15:26
Last Modified: 08 Apr 2025 06:57
Cite in APA 7: Gattuso, T. R., Meunier, M., Adler, D., & Haggerty, J. S. (1982, November). IR laser-induced deposition of silicon thin films [Paper]. 1982 MRS Fall Meeting, Boston, Massachusetts. Published in MRS Proceedings, 17. https://doi.org/10.1557/proc-17-215

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