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Hydrogenated amorphous silicon produced by laser induced chemical vapor deposition of silane

Michel Meunier, T. R. Gattuso, David Adler and J. S. Haggerty

Article (1983)

Document published while its authors were not affiliated with Polytechnique Montréal

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PolyPublie URL: https://publications.polymtl.ca/35791/
Journal Title: Applied Physics Letters (vol. 43, no. 3)
Publisher: American Institute of Physics
DOI: 10.1063/1.94324
Official URL: https://doi.org/10.1063/1.94324
Date Deposited: 18 Apr 2023 15:26
Last Modified: 08 Apr 2025 06:57
Cite in APA 7: Meunier, M., Gattuso, T. R., Adler, D., & Haggerty, J. S. (1983). Hydrogenated amorphous silicon produced by laser induced chemical vapor deposition of silane. Applied Physics Letters, 43(3), 273-273. https://doi.org/10.1063/1.94324

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