Susan D. Allen, John H. Flint, Michel Meunier
, David Adler and J. S. Haggerty
Paper (1984)
Document published while its authors were not affiliated with Polytechnique Montréal
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| PolyPublie URL: | https://publications.polymtl.ca/35679/ |
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| Conference Title: | Laser-Assisted Deposition, Etching, and Doping |
| Conference Location: | Los Angeles, Calif. |
| Conference Date(s): | 1984-01-24 |
| Publisher: | SPIE - International Society for Optical Engineering |
| DOI: | 10.1117/12.939437 |
| Official URL: | https://doi.org/10.1117/12.939437 |
| Date Deposited: | 18 Apr 2023 15:26 |
| Last Modified: | 08 Apr 2025 06:57 |
| Cite in APA 7: | Allen, S. D., Flint, J. H., Meunier, M., Adler, D., & Haggerty, J. S. (1984, January). A-S:H films produced from laser heated gases: Process characteristics and film properties [Paper]. Laser-Assisted Deposition, Etching, and Doping, Los Angeles, Calif.. https://doi.org/10.1117/12.939437 |
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