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Foundations of plasma enhanced chemical vapor deposition of functional coatings

R. Snyders, D. Hegemann, D. Thiry, O. Zabeida, Jolanta-Ewa Sapieha and Ludvik Martinu

Article (2023)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/54798/
Journal Title: Plasma Sources Science and Technology (vol. 32, no. 7)
Publisher: IOP Publishing Ltd
DOI: 10.1088/1361-6595/acdabc
Official URL: https://doi.org/10.1088/1361-6595/acdabc
Date Deposited: 30 Aug 2023 09:52
Last Modified: 05 Apr 2024 23:02
Cite in APA 7: Snyders, R., Hegemann, D., Thiry, D., Zabeida, O., Sapieha, J.-E., & Martinu, L. (2023). Foundations of plasma enhanced chemical vapor deposition of functional coatings. Plasma Sources Science and Technology, 32(7), 36 pages. https://doi.org/10.1088/1361-6595/acdabc

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