R. Snyders, D. Hegemann, D. Thiry, O. Zabeida, Jolanta-Ewa Sapieha
and Ludvik Martinu
Article (2023)
 Open Acess document in PolyPublie and at official publisher |
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| Department: | Department of Engineering Physics |
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| PolyPublie URL: | https://publications.polymtl.ca/54798/ |
| Journal Title: | Plasma Sources Science and Technology (vol. 32, no. 7) |
| Publisher: | IOP Publishing Ltd |
| DOI: | 10.1088/1361-6595/acdabc |
| Official URL: | https://doi.org/10.1088/1361-6595/acdabc |
| Date Deposited: | 30 Aug 2023 09:52 |
| Last Modified: | 30 Sep 2024 05:03 |
| Cite in APA 7: | Snyders, R., Hegemann, D., Thiry, D., Zabeida, O., Sapieha, J.-E., & Martinu, L. (2023). Foundations of plasma enhanced chemical vapor deposition of functional coatings. Plasma Sources Science and Technology, 32(7), 36 pages. https://doi.org/10.1088/1361-6595/acdabc |
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