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TEOS layers for low temperature processing of group IV optoelectronic devices

Simone Assali, Anis Attiaoui, Samik Mukherjee, Jérôme Nicolas and Oussama Moutanabbir

Article (2018)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/41490/
Journal Title: Journal of Vacuum Science & Technology B (vol. 36, no. 6)
Publisher: American Vacuum Society
DOI: 10.1116/1.5047909
Official URL: https://doi.org/10.1116/1.5047909
Date Deposited: 18 Apr 2023 15:02
Last Modified: 05 Apr 2024 11:38
Cite in APA 7: Assali, S., Attiaoui, A., Mukherjee, S., Nicolas, J., & Moutanabbir, O. (2018). TEOS layers for low temperature processing of group IV optoelectronic devices. Journal of Vacuum Science & Technology B, 36(6), 8 pages. https://doi.org/10.1116/1.5047909

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