Simone Assali, Anis Attiaoui, Samik Mukherjee, Jérôme Nicolas and Oussama Moutanabbir
Article (2018)
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| Department: | Department of Engineering Physics |
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| PolyPublie URL: | https://publications.polymtl.ca/41490/ |
| Journal Title: | Journal of Vacuum Science & Technology B (vol. 36, no. 6) |
| Publisher: | American Vacuum Society |
| DOI: | 10.1116/1.5047909 |
| Official URL: | https://doi.org/10.1116/1.5047909 |
| Date Deposited: | 18 Apr 2023 15:02 |
| Last Modified: | 08 Apr 2025 07:05 |
| Cite in APA 7: | Assali, S., Attiaoui, A., Mukherjee, S., Nicolas, J., & Moutanabbir, O. (2018). TEOS layers for low temperature processing of group IV optoelectronic devices. Journal of Vacuum Science & Technology B, 36(6), 8 pages. https://doi.org/10.1116/1.5047909 |
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