Simone Assali, Anis Attiaoui, Samik Mukherjee, Jérôme Nicolas and Oussama Moutanabbir
Article (2018)
An external link is available for this item
| Department: | Department of Engineering Physics |
|---|---|
| PolyPublie URL: | https://publications.polymtl.ca/41490/ |
| Journal Title: | Journal of Vacuum Science & Technology B (vol. 36, no. 6) |
| Publisher: | American Vacuum Society |
| DOI: | 10.1116/1.5047909 |
| Official URL: | https://doi.org/10.1116/1.5047909 |
| Date Deposited: | 18 Apr 2023 15:02 |
| Last Modified: | 25 Sep 2024 16:27 |
| Cite in APA 7: | Assali, S., Attiaoui, A., Mukherjee, S., Nicolas, J., & Moutanabbir, O. (2018). TEOS layers for low temperature processing of group IV optoelectronic devices. Journal of Vacuum Science & Technology B, 36(6), 8 pages. https://doi.org/10.1116/1.5047909 |
|---|---|
Statistics
Dimensions
Repository Staff Only
|
View Item |
