A. Amassian, S. Larouche, R. Vernhes, Jolanta-Ewa Sapieha
, Patrick Desjardins and Ludvik Martinu
Paper (2002)
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| Department: | Department of Engineering Physics |
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| PolyPublie URL: | https://publications.polymtl.ca/26896/ |
| Conference Title: | SPIE Regional Meeting on Optoelectronics, Photonics, and Imaging (Opto Canada 2002) |
| Conference Location: | Ottawa, Ont., Can. |
| Conference Date(s): | 2002-05-09 - 2002-05-10 |
| Publisher: | Society of photo-optical instrumentation engineers (SPIE) |
| DOI: | 10.1117/12.2283970 |
| Official URL: | https://doi.org/10.1117/12.2283970 |
| Date Deposited: | 18 Apr 2023 15:20 |
| Last Modified: | 18 Apr 2023 15:20 |
| Cite in APA 7: | Amassian, A., Larouche, S., Vernhes, R., Sapieha, J.-E., Desjardins, P., & Martinu, L. (2002, May). Analysis and control of optical film growth by in situ real-time spectroscopic ellipsometry [Paper]. SPIE Regional Meeting on Optoelectronics, Photonics, and Imaging (Opto Canada 2002), Ottawa, Ont., Can.. https://doi.org/10.1117/12.2283970 |
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