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Optimized return on inspection through smart-sampling

Mhamed Sahnoun, Philippe Vialletelle, Soidri Bastoini, Samuel Bassetto and Michel Tollenaere

Paper (2010)

Document published while its authors were not affiliated with Polytechnique Montréal

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PolyPublie URL: https://publications.polymtl.ca/17657/
Conference Title: International Symposium on Semiconductor Manufacturing (ISSM 2010)
Conference Location: Tokyo, Japan
Conference Date(s): 2010-10-18 - 2010-10-20
Publisher: IEEE
Official URL: https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&ar...
Date Deposited: 18 Apr 2023 15:14
Last Modified: 08 Jun 2023 11:25
Cite in APA 7: Sahnoun, M., Vialletelle, P., Bastoini, S., Bassetto, S., & Tollenaere, M. (2010, October). Optimized return on inspection through smart-sampling [Paper]. International Symposium on Semiconductor Manufacturing (ISSM 2010), Tokyo, Japan. https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=5750233&isnumber=5750172

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