Quality and exposure control in semiconductor manufacturing. Part II: Evaluation

Belgacem Bettayeb, Samuel Bassetto, Philippe Vialletelle and Michel Tollenaere

Article (2012)

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Department:	Department of Mathematics and Industrial Engineering
PolyPublie URL:	https://publications.polymtl.ca/15774/
Journal Title:	International Journal of Production Research (vol. 50, no. 23)
Publisher:	Taylor & Francis
DOI:	10.1080/00207543.2011.630043
Official URL:	https://doi.org/10.1080/00207543.2011.630043
Date Deposited:	18 Apr 2023 15:10
Last Modified:	05 Apr 2024 10:56

Cite in APA 7:	Bettayeb, B., Bassetto, S., Vialletelle, P., & Tollenaere, M. (2012). Quality and exposure control in semiconductor manufacturing. Part II: Evaluation. International Journal of Production Research, 50(23), 6852-6869. https://doi.org/10.1080/00207543.2011.630043
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