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Quality and exposure control in semiconductor manufacturing. Part I: Modelling

Belgacem Bettayeb, Samuel Bassetto, Philippe Vialletelle and Michel Tollenaere

Article (2012)

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Department: Department of Mathematics and Industrial Engineering
PolyPublie URL: https://publications.polymtl.ca/15773/
Journal Title: International Journal of Production Research (vol. 50, no. 23)
Publisher: Taylor & Francis
DOI: 10.1080/00207543.2011.630042
Official URL: https://doi.org/10.1080/00207543.2011.630042
Date Deposited: 18 Apr 2023 15:10
Last Modified: 25 Sep 2024 15:53
Cite in APA 7: Bettayeb, B., Bassetto, S., Vialletelle, P., & Tollenaere, M. (2012). Quality and exposure control in semiconductor manufacturing. Part I: Modelling. International Journal of Production Research, 50(23), 6835-6851. https://doi.org/10.1080/00207543.2011.630042

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