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Thin film Ni-Si solid-state reactions: Phase formation sequence on amorphized Si

Pierre Turcotte-Tremblay, Matthieu Guihard, Simon Gaudet, Martin Chicoine, Christian Lavoie, Patrick Desjardins and François Schiettekatte

Article (2013)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/13002/
Journal Title: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena (vol. 31, no. 5)
Publisher: American Vacuum Society
DOI: 10.1116/1.4821550
Official URL: https://doi.org/10.1116/1.4821550
Date Deposited: 18 Apr 2023 15:10
Last Modified: 05 Apr 2024 10:52
Cite in APA 7: Turcotte-Tremblay, P., Guihard, M., Gaudet, S., Chicoine, M., Lavoie, C., Desjardins, P., & Schiettekatte, F. (2013). Thin film Ni-Si solid-state reactions: Phase formation sequence on amorphized Si. Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, 31(5). https://doi.org/10.1116/1.4821550

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