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Documents publiés en "2006"

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Nombre de documents: 4

A

Amassian, A., Švec, M., Desjardins, P., & Martinu, L. (2006). Dynamics of ion bombardment-induced modifications of Si(001) at the radio-frequency-biased electrode in low-pressure oxygen plasmas: in situ spectroscopic ellipsometry and Monte Carlo study. Journal of Applied Physics, 100(6), 063526. Lien externe

Amassian, A., Švec, M., Desjardins, P., & Martinu, L. (2006). Interface broadening due to ion mixing during thin film growth at the radio-frequency-biased electrode in a plasma-enhanced chemical vapor deposition environment. Journal of vacuum science and technology. A, Vacuum, surfaces, and films, 24(6), 2061-2069. Lien externe

J

Jedrzejowski, P., Amassian, A., Bousser, É., Sapieha, J.-E., & Martinu, L. (2006). Real-time in situ growth study of TiN- and TiCₓNy-based superhard nanocomposite coatings using spectroscopic ellipsometry. Applied Physics Letters, 88(7), 71915-1. Lien externe

V

Vernhes, R., Amassian, A., Sapieha, J.-E., & Martinu, L. (2006). Plasma treatment of porous SiNₓ:H films for the fabrication of porous-dense multilayer optical filters with tailored interfaces. Journal of Applied Physics, 99(11), 114315.1-114315.12. Lien externe

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