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Real-time in situ growth study of TiN- and TiCₓNy-based superhard nanocomposite coatings using spectroscopic ellipsometry

P. Jedrzejowski, A. Amassian, E. Bousser, Jolanta-Ewa Sapieha and Ludvik Martinu

Article (2006)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/22942/
Journal Title: Applied Physics Letters (vol. 88, no. 7)
Publisher: American Institute of Physics
DOI: 10.1063/1.2173719
Official URL: https://doi.org/10.1063/1.2173719
Date Deposited: 18 Apr 2023 15:17
Last Modified: 05 Apr 2024 11:07
Cite in APA 7: Jedrzejowski, P., Amassian, A., Bousser, E., Sapieha, J.-E., & Martinu, L. (2006). Real-time in situ growth study of TiN- and TiCₓNy-based superhard nanocomposite coatings using spectroscopic ellipsometry. Applied Physics Letters, 88(7), 71915-1. https://doi.org/10.1063/1.2173719

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