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Plasma treatment of porous SiNₓ:H films for the fabrication of porous-dense multilayer optical filters with tailored interfaces

R. Vernhes, A. Amassian, Jolanta-Ewa Sapieha and Ludvik Martinu

Article (2006)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/22411/
Journal Title: Journal of Applied Physics (vol. 99, no. 11)
Publisher: American Institute of Physics
DOI: 10.1063/1.2202692
Official URL: https://doi.org/10.1063/1.2202692
Date Deposited: 18 Apr 2023 15:18
Last Modified: 05 Apr 2024 11:06
Cite in APA 7: Vernhes, R., Amassian, A., Sapieha, J.-E., & Martinu, L. (2006). Plasma treatment of porous SiNₓ:H films for the fabrication of porous-dense multilayer optical filters with tailored interfaces. Journal of Applied Physics, 99(11), 114315.1-114315.12-114315.1-114315.12. https://doi.org/10.1063/1.2202692

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