Plasma treatment of porous SiNₓ:H films for the fabrication of porous-dense multilayer optical filters with tailored interfaces

R. Vernhes, A. Amassian, Jolanta-Ewa Sapieha and Ludvik Martinu

Article (2006)

An external link is available for this item

Department:	Department of Engineering Physics
Research Center:	RQMP - Regroupement québécois sur les matériaux de pointe
PolyPublie URL:	https://publications.polymtl.ca/22411/
Journal Title:	Journal of Applied Physics (vol. 99, no. 11)
Publisher:	American Institute of Physics
DOI:	10.1063/1.2202692
Official URL:	https://doi.org/10.1063/1.2202692
Date Deposited:	18 Apr 2023 15:18
Last Modified:	08 Apr 2025 02:10

Cite in APA 7:	Vernhes, R., Amassian, A., Sapieha, J.-E., & Martinu, L. (2006). Plasma treatment of porous SiNₓ:H films for the fabrication of porous-dense multilayer optical filters with tailored interfaces. Journal of Applied Physics, 99(11), 114315.1-114315.12. https://doi.org/10.1063/1.2202692
APA 7 (HTML)ASCII CitationAtomBibTeXDOIsDublin CoreEndNote (.ENW)MARC (ISO 2709/UTF-8) (.MRC)MARC (UTF-8) (.MRK8)MARC XMLMPEG-21 DIDLMultiline CSVOAI-ORE Resource Map (Atom Format)OPENAIREOpenURL ContextObjectOpenURL ContextObject in SpanRDF+N-TriplesRDF+N3RDF+XMLReferReference Manager (.RIS)Simple Metadata

Statistics

Repository Staff Only