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Dynamics of ion bombardment-induced modifications of Si(001) at the radio-frequency-biased electrode in low-pressure oxygen plasmas: in situ spectroscopic ellipsometry and Monte Carlo study

A. Amassian, M. Svec, Patrick Desjardins and Ludvik Martinu

Article (2006)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/23451/
Journal Title: Journal of Applied Physics (vol. 100, no. 6)
Publisher: American Institute of Physics
DOI: 10.1063/1.2337260
Official URL: https://doi.org/10.1063/1.2337260
Date Deposited: 18 Apr 2023 15:17
Last Modified: 05 Apr 2024 11:08
Cite in APA 7: Amassian, A., Svec, M., Desjardins, P., & Martinu, L. (2006). Dynamics of ion bombardment-induced modifications of Si(001) at the radio-frequency-biased electrode in low-pressure oxygen plasmas: in situ spectroscopic ellipsometry and Monte Carlo study. Journal of Applied Physics, 100(6), 063526. https://doi.org/10.1063/1.2337260

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