Dynamics of ion bombardment-induced modifications of Si(001) at the radio-frequency-biased electrode in low-pressure oxygen plasmas: in situ spectroscopic ellipsometry and Monte Carlo study

A. Amassian, Martin Švec, Patrick Desjardins and Ludvik Martinu

Article (2006)

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Department:	Department of Engineering Physics
Research Center:	RQMP - Regroupement québécois sur les matériaux de pointe
PolyPublie URL:	https://publications.polymtl.ca/23451/
Journal Title:	Journal of Applied Physics (vol. 100, no. 6)
Publisher:	American Institute of Physics
DOI:	10.1063/1.2337260
Official URL:	https://doi.org/10.1063/1.2337260
Date Deposited:	18 Apr 2023 15:17
Last Modified:	08 Apr 2025 02:11

Cite in APA 7:	Amassian, A., Švec, M., Desjardins, P., & Martinu, L. (2006). Dynamics of ion bombardment-induced modifications of Si(001) at the radio-frequency-biased electrode in low-pressure oxygen plasmas: in situ spectroscopic ellipsometry and Monte Carlo study. Journal of Applied Physics, 100(6), 063526. https://doi.org/10.1063/1.2337260
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