A. Amassian, M. Svec, Patrick Desjardins and Ludvik Martinu
Article (2006)
An external link is available for this itemDepartment: | Department of Engineering Physics |
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Research Center: | RQMP - Regroupement québécois sur les matériaux de pointe |
PolyPublie URL: | https://publications.polymtl.ca/23451/ |
Journal Title: | Journal of Applied Physics (vol. 100, no. 6) |
Publisher: | American Institute of Physics |
DOI: | 10.1063/1.2337260 |
Official URL: | https://doi.org/10.1063/1.2337260 |
Date Deposited: | 18 Apr 2023 15:17 |
Last Modified: | 27 Sep 2024 13:55 |
Cite in APA 7: | Amassian, A., Svec, M., Desjardins, P., & Martinu, L. (2006). Dynamics of ion bombardment-induced modifications of Si(001) at the radio-frequency-biased electrode in low-pressure oxygen plasmas: in situ spectroscopic ellipsometry and Monte Carlo study. Journal of Applied Physics, 100(6), 063526. https://doi.org/10.1063/1.2337260 |
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