Hard AlN films prepared by low duty cycle magnetron sputtering and by other deposition techniques

Jiří Kohout, Jincheng Qian, Thomas Schmitt, Richard Vernhes, Oleg Zabeida, Jolanta-Ewa Sapieha and Ludvik Martinu

Article (2017)

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Department:	Department of Engineering Physics
PolyPublie URL:	https://publications.polymtl.ca/38492/
Journal Title:	Journal of vacuum science and technology. A, Vacuum, surfaces, and films (vol. 35, no. 6)
Publisher:	AVS Science and Technology Society
DOI:	10.1116/1.4999460
Official URL:	https://doi.org/10.1116/1.4999460
Date Deposited:	18 Apr 2023 15:04
Last Modified:	25 Sep 2024 16:22

Cite in APA 7:	Kohout, J., Qian, J., Schmitt, T., Vernhes, R., Zabeida, O., Sapieha, J.-E., & Martinu, L. (2017). Hard AlN films prepared by low duty cycle magnetron sputtering and by other deposition techniques. Journal of vacuum science and technology. A, Vacuum, surfaces, and films, 35(6), 9 pages. https://doi.org/10.1116/1.4999460
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