Jiří Kohout, Jincheng Qian, Thomas Schmitt, Richard Vernhes, Oleg Zabeida, Jolanta-Ewa Sapieha and Ludvik Martinu
Article (2017)
An external link is available for this itemDepartment: | Department of Engineering Physics |
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PolyPublie URL: | https://publications.polymtl.ca/38492/ |
Journal Title: | Journal of vacuum science and technology. A, Vacuum, surfaces, and films (vol. 35, no. 6) |
Publisher: | AVS Science and Technology Society |
DOI: | 10.1116/1.4999460 |
Official URL: | https://doi.org/10.1116/1.4999460 |
Date Deposited: | 18 Apr 2023 15:04 |
Last Modified: | 25 Sep 2024 16:22 |
Cite in APA 7: | Kohout, J., Qian, J., Schmitt, T., Vernhes, R., Zabeida, O., Sapieha, J.-E., & Martinu, L. (2017). Hard AlN films prepared by low duty cycle magnetron sputtering and by other deposition techniques. Journal of vacuum science and technology. A, Vacuum, surfaces, and films, 35(6), 9 pages. https://doi.org/10.1116/1.4999460 |
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