Hard AlN films prepared by low duty cycle magnetron sputtering and by other deposition techniques

Jiří Kohout, Jincheng Qian, Thomas Schmitt, Richard Vernhes, Oleg Zabeida, Jolanta-Ewa Sapieha and Ludvik Martinu

Article (2017)

An external link is available for this item

Department:	Department of Engineering Physics
PolyPublie URL:	https://publications.polymtl.ca/38492/
Journal Title:	Journal of vacuum science and technology. A, Vacuum, surfaces, and films (vol. 35, no. 6)
Publisher:	AVS Science and Technology Society
DOI:	10.1116/1.4999460
Official URL:	https://doi.org/10.1116/1.4999460
Date Deposited:	18 Apr 2023 15:04
Last Modified:	25 Apr 2023 17:22

Cite in APA 7:	Kohout, J., Qian, J., Schmitt, T., Vernhes, R., Zabeida, O., Sapieha, J.-E., & Martinu, L. (2017). Hard AlN films prepared by low duty cycle magnetron sputtering and by other deposition techniques. Journal of vacuum science and technology. A, Vacuum, surfaces, and films, 35(6), 9 pages. https://doi.org/10.1116/1.4999460
APA 7 (HTML)ASCII CitationAtomBibTeXDOIsDublin CoreEndNote (.ENW)MARC (ISO 2709/UTF-8) (.MRC)MARC (UTF-8) (.MRK8)MARC XMLMPEG-21 DIDLMultiline CSVOAI-ORE Resource Map (Atom Format)OPENAIREOpenURL ContextObjectOpenURL ContextObject in SpanRDF+N-TriplesRDF+N3RDF+XMLReferReference Manager (.RIS)Répertoire des publications (EndNote)Simple Metadata

Statistics

Repository Staff Only