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Deposition of TiN films using a thermal plasma reactive forming technology

S. Grenier, K. Shanker, P. Tsantrizos and Frank Ajersch

Article (1996)

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Additional Information: Nom historique du département: Département de génie électrique et de génie informatique
Department: Department of Electrical Engineering
Department of Computer Engineering and Software Engineering
PolyPublie URL: https://publications.polymtl.ca/31283/
Journal Title: Surface & Coatings Technology (vol. 82, no. 3)
Publisher: Elsevier
DOI: 10.1016/0257-8972(95)02744-0
Official URL: https://doi.org/10.1016/0257-8972%2895%2902744-0
Date Deposited: 18 Apr 2023 15:24
Last Modified: 05 Apr 2024 11:21
Cite in APA 7: Grenier, S., Shanker, K., Tsantrizos, P., & Ajersch, F. (1996). Deposition of TiN films using a thermal plasma reactive forming technology. Surface & Coatings Technology, 82(3), 311-316. https://doi.org/10.1016/0257-8972%2895%2902744-0

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