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The determination of phases formed in AlSiCu/TiN/Ti contact metallization structure of integrated circuits by x-ray diffraction

V. Fortin, G. Gagnon, M. Caron, S. C. Gujrathi, John F. Currie, L. Ouellet, Y. Tremblay and M. Biberger

Article (1998)

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Additional Information: Nom historique du département: Département de génie physique et de génie des matériaux
Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/29689/
Journal Title: Journal of Applied Physics (vol. 83, no. 1)
Publisher: American Institute of Physics
DOI: 10.1063/1.366710
Official URL: https://doi.org/10.1063/1.366710
Date Deposited: 18 Apr 2023 15:23
Last Modified: 05 Apr 2024 11:18
Cite in APA 7: Fortin, V., Gagnon, G., Caron, M., Gujrathi, S. C., Currie, J. F., Ouellet, L., Tremblay, Y., & Biberger, M. (1998). The determination of phases formed in AlSiCu/TiN/Ti contact metallization structure of integrated circuits by x-ray diffraction. Journal of Applied Physics, 83(1), 132-138. https://doi.org/10.1063/1.366710

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