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Synchrotron x-ray diffraction and transmission electon microscopy studies of interfacial reaction paths and kinetics annealing of fully-002-textured Al/TiN bilayers

J.-S. Chun, J. R. A. Carlsson, Patrick Desjardins, D. B. Bergstrom, I. Petrov, J. E. Greene, C. Lavoie and C. , jr. Cabral

Article (2001)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/27503/
Journal Title: Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena (vol. 19, no. 1)
Publisher: American Vacuum Society
DOI: 10.1116/1.1322648
Official URL: https://doi.org/10.1116/1.1322648
Date Deposited: 18 Apr 2023 15:21
Last Modified: 05 Apr 2024 11:15
Cite in APA 7: Chun, J.-S., Carlsson, J. R. A., Desjardins, P., Bergstrom, D. B., Petrov, I., Greene, J. E., Lavoie, C., & Cabral, C. (2001). Synchrotron x-ray diffraction and transmission electon microscopy studies of interfacial reaction paths and kinetics annealing of fully-002-textured Al/TiN bilayers. Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 19(1), 182-191. https://doi.org/10.1116/1.1322648

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