J.-S. Chun, J. R. A. Carlsson, Patrick Desjardins
, D. B. Bergstrom, I. Petrov, J. E. Greene, C. Lavoie and C. , jr. Cabral
Article (2001)
An external link is available for this item
| Department: | Department of Engineering Physics |
|---|---|
| PolyPublie URL: | https://publications.polymtl.ca/27503/ |
| Journal Title: | Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena (vol. 19, no. 1) |
| Publisher: | American Vacuum Society |
| DOI: | 10.1116/1.1322648 |
| Official URL: | https://doi.org/10.1116/1.1322648 |
| Date Deposited: | 18 Apr 2023 15:21 |
| Last Modified: | 08 Apr 2025 02:17 |
| Cite in APA 7: | Chun, J.-S., Carlsson, J. R. A., Desjardins, P., Bergstrom, D. B., Petrov, I., Greene, J. E., Lavoie, C., & Cabral, C. (2001). Synchrotron x-ray diffraction and transmission electon microscopy studies of interfacial reaction paths and kinetics annealing of fully-002-textured Al/TiN bilayers. Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 19(1), 182-191. https://doi.org/10.1116/1.1322648 |
|---|---|
Statistics
Dimensions
Repository Staff Only
|
View Item |
