A. Amassian, Patrick Desjardins
and Ludvik Martinu
Article (2004)
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| Department: | Department of Engineering Physics |
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| Research Center: | GCM - Thin Film Physics and Technology Research Group |
| PolyPublie URL: | https://publications.polymtl.ca/25351/ |
| Journal Title: | Thin Solid Films (vol. 447-448, no. 3) |
| Publisher: | Elsevier |
| DOI: | 10.1016/j.tsf.2003.09.019 |
| Official URL: | https://doi.org/10.1016/j.tsf.2003.09.019 |
| Date Deposited: | 18 Apr 2023 15:19 |
| Last Modified: | 08 Apr 2025 02:14 |
| Cite in APA 7: | Amassian, A., Desjardins, P., & Martinu, L. (2004). Study of TiO₂ film growth mechanisms in low-pressure plasma by in situ real-time spectroscopic ellipsometry. Thin Solid Films, 447-448(3), 40-45. https://doi.org/10.1016/j.tsf.2003.09.019 |
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