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Study of TiO₂ film growth mechanisms in low-pressure plasma by in situ real-time spectroscopic ellipsometry

A. Amassian, Patrick Desjardins and Ludvik Martinu

Article (2004)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/25351/
Journal Title: Thin Solid Films (vol. 447-448, no. 3)
Publisher: Elsevier
DOI: 10.1016/j.tsf.2003.09.019
Official URL: https://doi.org/10.1016/j.tsf.2003.09.019
Date Deposited: 18 Apr 2023 15:19
Last Modified: 05 Apr 2024 11:11
Cite in APA 7: Amassian, A., Desjardins, P., & Martinu, L. (2004). Study of TiO₂ film growth mechanisms in low-pressure plasma by in situ real-time spectroscopic ellipsometry. Thin Solid Films, 447-448(3), 40-45. https://doi.org/10.1016/j.tsf.2003.09.019

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