A. Amassian, R. Verhnes, Jolanta-Ewa Sapieha
, Patrick Desjardins and Ludvik Martinu
Article (2004)
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| Department: | Department of Engineering Physics |
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| PolyPublie URL: | https://publications.polymtl.ca/25350/ |
| Journal Title: | Thin Solid Films (vol. 469-470) |
| Publisher: | Elsevier |
| DOI: | 10.1016/j.tsf.2004.07.072 |
| Official URL: | https://doi.org/10.1016/j.tsf.2004.07.072 |
| Date Deposited: | 18 Apr 2023 15:19 |
| Last Modified: | 18 Apr 2023 15:19 |
| Cite in APA 7: | Amassian, A., Verhnes, R., Sapieha, J.-E., Desjardins, P., & Martinu, L. (2004). Interface engineering during plasma-enhances chemical vapor deposition of porous/dense SiN1.3 optical multilayers. Thin Solid Films, 469-470, 47-53. https://doi.org/10.1016/j.tsf.2004.07.072 |
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