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Characterization of GaAs₁₋ₓ Nₓ epitaxial layers by ion beam analysis

P. Wei, M. Chicoine, S. Gujrathi, François Schiettekatte, J. N. Beaudry, Rémo A. Masut and Patrick Desjardins

Article (2004)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/24531/
Journal Title: Journal of vacuum science and technology. A, Vacuum, surfaces, and films (vol. 22, no. 3)
Publisher: American Vacuum Society
DOI: 10.1116/1.1648671
Official URL: https://doi.org/10.1116/1.1648671
Date Deposited: 18 Apr 2023 15:19
Last Modified: 02 May 2024 16:14
Cite in APA 7: Wei, P., Chicoine, M., Gujrathi, S., Schiettekatte, F., Beaudry, J. N., Masut, R. A., & Desjardins, P. (2004). Characterization of GaAs₁₋ₓ Nₓ epitaxial layers by ion beam analysis. Journal of vacuum science and technology. A, Vacuum, surfaces, and films, 22(3), 908-911. https://doi.org/10.1116/1.1648671

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