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Ion-surface interactions on c-Si(001) at the radiofrequency-powered electrode in low-pressure plasmas: ex situ spectroscopic ellipsometry and Monte Carlo simulation study

A. Amassian, Patrick Desjardins and Ludvik Martinu

Article (2006)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/23454/
Journal Title: Journal of vacuum science and technology. A, Vacuum, surfaces, and films (vol. 24, no. 1)
Publisher: American Vacuum Society
DOI: 10.1116/1.2134709
Official URL: https://doi.org/10.1116/1.2134709
Date Deposited: 18 Apr 2023 15:17
Last Modified: 05 Apr 2024 11:08
Cite in APA 7: Amassian, A., Desjardins, P., & Martinu, L. (2006). Ion-surface interactions on c-Si(001) at the radiofrequency-powered electrode in low-pressure plasmas: ex situ spectroscopic ellipsometry and Monte Carlo simulation study. Journal of vacuum science and technology. A, Vacuum, surfaces, and films, 24(1), 45-54. https://doi.org/10.1116/1.2134709

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