Aram Amassian, Patrick Desjardins and Ludvik Martinu
Article (2006)
An external link is available for this itemDepartment: | Department of Engineering Physics |
---|---|
Research Center: | RQMP - Regroupement québécois sur les matériaux de pointe |
PolyPublie URL: | https://publications.polymtl.ca/23454/ |
Journal Title: | Journal of vacuum science and technology. A, Vacuum, surfaces, and films (vol. 24, no. 1) |
Publisher: | American Vacuum Society |
DOI: | 10.1116/1.2134709 |
Official URL: | https://doi.org/10.1116/1.2134709 |
Date Deposited: | 18 Apr 2023 15:17 |
Last Modified: | 26 Sep 2024 13:11 |
Cite in APA 7: | Amassian, A., Desjardins, P., & Martinu, L. (2006). Ion-surface interactions on c-Si(001) at the radiofrequency-powered electrode in low-pressure plasmas: ex situ spectroscopic ellipsometry and Monte Carlo simulation study. Journal of vacuum science and technology. A, Vacuum, surfaces, and films, 24(1), 45-54. https://doi.org/10.1116/1.2134709 |
---|---|
Statistics
Dimensions