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Three dimensional reciprocal space measurement by x-ray diffraction using linear and area detectors: Applications to texture and defects determination in oriented thin films and nanoprecipitates

Simon Gaudet, Koen De Keyser, Samuel Lambert-Milot, Jean Jordan-Sweet, Christophe Detavernier, Christian Lavoie and Patrick Desjardins

Article (2013)

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Department: Department of Engineering Physics
Research Center: RQMP - Regroupement québécois sur les matériaux de pointe
PolyPublie URL: https://publications.polymtl.ca/13872/
Journal Title: Journal of vacuum science and technology. A, Vacuum, surfaces, and films (vol. 31, no. 2)
Publisher: American Vacuum Society
DOI: 10.1116/1.4789984
Official URL: https://doi.org/10.1116/1.4789984
Date Deposited: 18 Apr 2023 15:09
Last Modified: 27 Sep 2024 10:49
Cite in APA 7: Gaudet, S., De Keyser, K., Lambert-Milot, S., Jordan-Sweet, J., Detavernier, C., Lavoie, C., & Desjardins, P. (2013). Three dimensional reciprocal space measurement by x-ray diffraction using linear and area detectors: Applications to texture and defects determination in oriented thin films and nanoprecipitates. Journal of vacuum science and technology. A, Vacuum, surfaces, and films, 31(2). https://doi.org/10.1116/1.4789984

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