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Items where Author is "Suys, Marc"

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Izquierdo, R., Bertomeu, J., Suys, M., Sacher, E., & Meunier, M. (1995). Excimer laser-induced deposition of copper from Cu(hfac) (TMVS). Applied Surface Science, 86(1), 509-513. External link


Meunier, M., Izquierdo, R., Tabbal, M., Evoy, S., Desjardins, P., Bernier, M.-H., Bertomeu, J., Elyaagoubi, N., Suys, M., Sacher, E., & Yelon, A. (1997). Laser induced deposition of tungsten and copper. Materials Science and Engineering. B, Solid-State Materials for Advanced Technology, 45(1-3), 200-207. External link

Meunier, M., Suys, M., Tabbal, M., Izquierdo, R., Yelon, A., & Sacher, E. (1994). Excimer laser-induced metallization for in situ processing on Si and GaAs. Applied Surface Science, 79(1-4), 208-214. External link

Meunier, M., Tabbal, M., Suys, M., Izquierdo, R., Yelon, A., Sacher, E., & Poulin, S. (1993, August). Excimer laser-induced metallization for Si and GaAs microelectronics [Paper]. Laser-Assisted Fabrication of Thin Films and Microstructures, Québec, Can. External link


Suys, M., Izquierdo, R., Sacher, E., & Meunier, M. (1994, October). Excimer laser chemical vapor deposition of copper from Cu(hfac) (TMVS) [Paper]. Advanced Metallization for ULSI, Austin, Texas, USA. Unavailable

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