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Excimer laser-induced metallization for in situ processing on Si and GaAs

Michel Meunier, Marc Suys, Maleck Tabbal, Ricardo Izquierdo, Arthur Yelon and Edward Sacher

Article (1994)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/33007/
Journal Title: Applied Surface Science (vol. 79, no. 1-4)
Publisher: Elsevier
DOI: 10.1016/0169-4332(94)90411-1
Official URL: https://doi.org/10.1016/0169-4332%2894%2990411-1
Date Deposited: 18 Apr 2023 15:25
Last Modified: 05 Apr 2024 11:23
Cite in APA 7: Meunier, M., Suys, M., Tabbal, M., Izquierdo, R., Yelon, A., & Sacher, E. (1994). Excimer laser-induced metallization for in situ processing on Si and GaAs. Applied Surface Science, 79(1-4), 208-214. https://doi.org/10.1016/0169-4332%2894%2990411-1

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