<  Back to the Polytechnique Montréal portal

Excimer laser-induced metallization for in situ processing on Si and GaAs

Michel Meunier, Marc Suys, Maleck Tabbal, Ricardo Izquierdo, Arthur Yelon and Edward Sacher

Article (1994)

An external link is available for this item
Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/33007/
Journal Title: Applied Surface Science (vol. 79, no. 1-4)
Publisher: Elsevier
DOI: 10.1016/0169-4332(94)90411-1
Official URL: https://doi.org/10.1016/0169-4332%2894%2990411-1
Date Deposited: 18 Apr 2023 15:25
Last Modified: 25 Sep 2024 16:15
Cite in APA 7: Meunier, M., Suys, M., Tabbal, M., Izquierdo, R., Yelon, A., & Sacher, E. (1994). Excimer laser-induced metallization for in situ processing on Si and GaAs. Applied Surface Science, 79(1-4), 208-214. https://doi.org/10.1016/0169-4332%2894%2990411-1

Statistics

Dimensions

Repository Staff Only

View Item View Item