Marc Suys, Ricardo Izquierdo, Edward Sacher, Michel Meunier
Paper (1994)
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Conference Title:
Advanced Metallization for ULSI
Conference Location:
Austin, Texas, USA
Conference Date(s):
1994-10-04 - 1994-10-06
OAI:
oai:publications.polymtl.ca:32823
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Date Deposited:
18 Apr 2023 15:25
Last Modified:
08 Oct 2026 17:43
Cite in APA 7:
Suys, M., Izquierdo, R., Sacher, E., & Meunier, M. (1994, October). Excimer laser chemical vapor deposition of copper from Cu(hfac) (TMVS) [Paper]. Advanced Metallization for ULSI, Austin, Texas, USA.
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