Marc Suys, Ricardo Izquierdo, Edward Sacher and Michel Meunier
Paper (1994)
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| Department: | Department of Engineering Physics |
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| Research Center: | GCM - Thin Film Physics and Technology Research Group |
| PolyPublie URL: | https://publications.polymtl.ca/32823/ |
| Conference Title: | Advanced Metallization for ULSI |
| Conference Location: | Austin, Texas, USA |
| Conference Date(s): | 1994-10-04 - 1994-10-06 |
| Date Deposited: | 18 Apr 2023 15:25 |
| Last Modified: | 25 Sep 2024 16:15 |
| Cite in APA 7: | Suys, M., Izquierdo, R., Sacher, E., & Meunier, M. (1994, October). Excimer laser chemical vapor deposition of copper from Cu(hfac) (TMVS) [Paper]. Advanced Metallization for ULSI, Austin, Texas, USA. |
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