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Excimer laser-induced metallization for Si and GaAs microelectronics

Michel Meunier, Maleck Tabbal, Marc Suys, Ricardo Izquierdo, Arthur Yelon, Edward Sacher and Suzie Poulin

Paper (1993)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/33006/
Conference Title: Laser-Assisted Fabrication of Thin Films and Microstructures
Conference Location: Québec, Can
Conference Date(s): 1993-08-17 - 1993-08-19
Publisher: Society of photo-optical instrumentation engineers (SPIE)
DOI: 10.1117/12.167545
Official URL: https://doi.org/10.1117/12.167545
Date Deposited: 18 Apr 2023 15:26
Last Modified: 05 Apr 2024 11:23
Cite in APA 7: Meunier, M., Tabbal, M., Suys, M., Izquierdo, R., Yelon, A., Sacher, E., & Poulin, S. (1993, August). Excimer laser-induced metallization for Si and GaAs microelectronics [Paper]. Laser-Assisted Fabrication of Thin Films and Microstructures, Québec, Can. https://doi.org/10.1117/12.167545

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