Michel Meunier
, Maleck Tabbal, Marc Suys, Ricardo Izquierdo, Arthur Yelon, Edward Sacher and Suzie Poulin
Paper (1993)
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| Department: | Department of Engineering Physics |
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| ISBN: | 0819413046 |
| PolyPublie URL: | https://publications.polymtl.ca/33006/ |
| Conference Title: | Laser-Assisted Fabrication of Thin Films and Microstructures |
| Conference Location: | Québec, Can |
| Conference Date(s): | 1993-08-17 - 1993-08-19 |
| Publisher: | Society of photo-optical instrumentation engineers (SPIE) |
| DOI: | 10.1117/12.167545 |
| Official URL: | https://doi.org/10.1117/12.167545 |
| Date Deposited: | 18 Apr 2023 15:26 |
| Last Modified: | 08 Apr 2025 06:54 |
| Cite in APA 7: | Meunier, M., Tabbal, M., Suys, M., Izquierdo, R., Yelon, A., Sacher, E., & Poulin, S. (1993, August). Excimer laser-induced metallization for Si and GaAs microelectronics [Paper]. Laser-Assisted Fabrication of Thin Films and Microstructures, Québec, Can. https://doi.org/10.1117/12.167545 |
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