Characterization of microstructure and dopant distribution of laser diffused resistors

Abstract

Laser fine tuning technology -- Laser induced silicon melting and its application to microelectronics -- Laser induced heating of materials -- Laser induce silicon melting -- Laser fine tuning -- Overview of analytical techniques for dopant evaluation and structural characterization -- Dopant and impurity evaluation -- 2-D Dopant determination in laser diffused Si resistors using dopant-selective etching -- Experimental details and procedure -- Dopant profiling of LDRs -- Laser induced formation of periodic nanostructures in silicon covered by SIOb2s -- Array of periodic submicron conductive links in Si covered by SIOb2s formed by polarized laser irradiation -- Structural characterization of laser diffused resistors -- Fabrication of LDRs -- Point defect formation in LDRs -- Material interdiffusion between liquid Si and dielectric -- Dislocations -- Mass transport due to liquid convection.

Uncontrolled Keywords

Résistances électriques -- Conception et construction; Microstructure (Physique); Lasers dans l'industrie des semi-conducteurs