Modeling Study of Laser Beam Scattering by Defects on Semiconductor Wafers

Srikumar Sandeep and Alexander Kokhanovsky

Article (2016)

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Department:	Department of Electrical Engineering
PolyPublie URL:	https://publications.polymtl.ca/61769/
Journal Title:	International Journal of Microwave Engineering (vol. 1, no. 4)
DOI:	10.5121/jmicro.2016.1404
Official URL:	https://doi.org/10.5121/jmicro.2016.1404
Date Deposited:	08 Jan 2025 11:07
Last Modified:	08 Jan 2025 11:07

Cite in APA 7:	Sandeep, S., & Kokhanovsky, A. (2016). Modeling Study of Laser Beam Scattering by Defects on Semiconductor Wafers. International Journal of Microwave Engineering, 1(4), 35-43. https://doi.org/10.5121/jmicro.2016.1404
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