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Probing the infrared properties of a p-doped Ge\(_{0.938}\)Sn\(_{0.062}\) thin film via polarization-dependent FTIR spectroscopy

B. N. Carnio, B. Shahriar, A. Attiaoui, M. R. M. Atalla, S. Assali, Oussama Moutanabbir and A. Y. Elezzabi

Article (2024)

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Abstract

The complex relative permittivity of doped Ge₁₋ₓSnₓ thin films (realized using state-of-the-art growth techniques) are obtained by devising a methodology based upon polarization-dependent reflection measurements along with multi-layer Fresnel reflection equations. The developed approach is implemented to acquire the complex relative permittivity of a 170-nm-thick Ge₁₋ₓSnₓ film exhibiting a hole carrier concentration of 3.3 × 10¹⁹ cm⁻³ and x = 6.2%, with this Sn composition suggesting the film is on the cusp of exhibiting a direct bandgap. The investigation conducted on this thin film as well as the developed methodology are expected to further establish Ge₁₋ₓSnₓ as the primary semiconductor for on-chip light emission and sensing devices.

Uncontrolled Keywords

doping; electric measurements; infrared radiation; fourier transform spectroscopy; optical properties; resistivity measurements; thin films; chemical vapor deposition; regression analysis

Subjects: 2500 Electrical and electronic engineering > 2500 Electrical and electronic engineering
2500 Electrical and electronic engineering > 2523 Semiconductor fabrication and packaging
3100 Physics > 3100 Physics
3100 Physics > 3101 Atomic and molecular studies
Department: Department of Engineering Physics
Funders: NSERC / CRSNG, Defence R&D Canada
PolyPublie URL: https://publications.polymtl.ca/57390/
Journal Title: Applied Physics Letters (vol. 124, no. 7)
Publisher: AIP Publishing
DOI: 10.1063/5.0187087
Official URL: https://doi.org/10.1063/5.0187087
Date Deposited: 28 Feb 2024 14:05
Last Modified: 29 Apr 2024 10:31
Cite in APA 7: Carnio, B. N., Shahriar, B., Attiaoui, A., Atalla, M. R. M., Assali, S., Moutanabbir, O., & Elezzabi, A. Y. (2024). Probing the infrared properties of a p-doped Ge\(_{0.938}\)Sn\(_{0.062}\) thin film via polarization-dependent FTIR spectroscopy. Applied Physics Letters, 124(7), 072102 (6 pages). https://doi.org/10.1063/5.0187087

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