Artem Shelemin, Oleg Zabeida, Jolanta-Ewa Sapieha
and Ludvik Martinu
Article (2021)
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| Department: | Department of Engineering Physics |
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| PolyPublie URL: | https://publications.polymtl.ca/49989/ |
| Journal Title: | Journal of vacuum science and technology. A, Vacuum, surfaces, and films (vol. 39, no. 6) |
| Publisher: | AVS Science and Technology Society |
| DOI: | 10.1116/6.0001291 |
| Official URL: | https://doi.org/10.1116/6.0001291 |
| Date Deposited: | 18 Apr 2023 15:00 |
| Last Modified: | 25 Sep 2024 16:39 |
| Cite in APA 7: | Shelemin, A., Zabeida, O., Sapieha, J.-E., & Martinu, L. (2021). Ion beam assisted chemical vapor deposition of hybrid coatingsProcess diagnostics and mechanisms. Journal of vacuum science and technology. A, Vacuum, surfaces, and films, 39(6), 17 pages. https://doi.org/10.1116/6.0001291 |
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