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Ion beam assisted chemical vapor deposition of hybrid coatingsProcess diagnostics and mechanisms

Artem Shelemin, Oleg Zabeida, Jolanta-Ewa Sapieha and Ludvik Martinu

Article (2021)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/49989/
Journal Title: Journal of vacuum science and technology. A, Vacuum, surfaces, and films (vol. 39, no. 6)
Publisher: AVS Science and Technology Society
DOI: 10.1116/6.0001291
Official URL: https://doi.org/10.1116/6.0001291
Date Deposited: 18 Apr 2023 15:00
Last Modified: 05 Apr 2024 11:53
Cite in APA 7: Shelemin, A., Zabeida, O., Sapieha, J.-E., & Martinu, L. (2021). Ion beam assisted chemical vapor deposition of hybrid coatingsProcess diagnostics and mechanisms. Journal of vacuum science and technology. A, Vacuum, surfaces, and films, 39(6), 17 pages. https://doi.org/10.1116/6.0001291

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