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Erratum: Ion beam assisted chemical vapor deposition of hybrid coatings-Process diagnostics and mechanisms

Artem Shelemin, Oleg Zabeida, Jolanta-Ewa Sapieha and Ludvik Martinu

Article (2023)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/53480/
Journal Title: Journal of Vacuum Science & Technology A: Vacuum, Surfaces and Films (vol. 41, no. 3)
Publisher: AVS Science and Technology Society
DOI: 10.1116/6.0002558
Official URL: https://doi.org/10.1116/6.0002558
Date Deposited: 10 Jul 2023 16:30
Last Modified: 05 Apr 2024 11:58
Cite in APA 7: Shelemin, A., Zabeida, O., Sapieha, J.-E., & Martinu, L. (2023). Erratum: Ion beam assisted chemical vapor deposition of hybrid coatings-Process diagnostics and mechanisms. Journal of Vacuum Science & Technology A: Vacuum, Surfaces and Films, 41(3), 2 pages. https://doi.org/10.1116/6.0002558

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