Artem Shelemin, Oleg Zabeida, Jolanta-Ewa Sapieha
and Ludvik Martinu
Article (2023)
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| Department: | Department of Engineering Physics |
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| PolyPublie URL: | https://publications.polymtl.ca/53480/ |
| Journal Title: | Journal of Vacuum Science & Technology A: Vacuum, Surfaces and Films (vol. 41, no. 3) |
| Publisher: | AVS Science and Technology Society |
| DOI: | 10.1116/6.0002558 |
| Official URL: | https://doi.org/10.1116/6.0002558 |
| Date Deposited: | 10 Jul 2023 16:30 |
| Last Modified: | 25 Sep 2024 16:44 |
| Cite in APA 7: | Shelemin, A., Zabeida, O., Sapieha, J.-E., & Martinu, L. (2023). Erratum: Ion beam assisted chemical vapor deposition of hybrid coatings-Process diagnostics and mechanisms. Journal of Vacuum Science & Technology A: Vacuum, Surfaces and Films, 41(3), 2 pages. https://doi.org/10.1116/6.0002558 |
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