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Reactive HiPIMS deposition of SiO₂/Ta₂O₅ optical interference filters

M. Hala, R. Vernhes, O. Zabeida, Jolanta-Ewa Sapieha and Ludvik Martinu

Article (2014)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/41948/
Journal Title: Journal of Applied Physics (vol. 116, no. 21)
Publisher: American Institute of Physics
DOI: 10.1063/1.4903285
Official URL: https://doi.org/10.1063/1.4903285
Date Deposited: 18 Apr 2023 15:08
Last Modified: 05 Apr 2024 11:39
Cite in APA 7: Hala, M., Vernhes, R., Zabeida, O., Sapieha, J.-E., & Martinu, L. (2014). Reactive HiPIMS deposition of SiO₂/Ta₂O₅ optical interference filters. Journal of Applied Physics, 116(21), 213302-213302. https://doi.org/10.1063/1.4903285

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