Radio frequency or microwave plasma reactors? Factors determining the optimum frequency of operation

M. Moisan, C. Barbeau, R. Claude, C. M. Ferreira, J. Margot, J. Paraszczak, A. B. Sá, G. Sauvé et Michael R. Wertheimer

Article de revue (1991)

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Département:	Département de génie physique
URL de PolyPublie:	https://publications.polymtl.ca/38195/
Titre de la revue:	Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena (vol. 9, no 1)
Maison d'édition:	American Vacuum Society
DOI:	10.1116/1.585795
URL officielle:	https://doi.org/10.1116/1.585795
Date du dépôt:	18 avr. 2023 15:26
Dernière modification:	25 sept. 2024 16:22

Citer en APA 7:

Moisan, M., Barbeau, C., Claude, R., Ferreira, C. M., Margot, J., Paraszczak, J., Sá, A. B., Sauvé, G., & Wertheimer, M. R. (1991). Radio frequency or microwave plasma reactors? Factors determining the optimum frequency of operation. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, 9(1), 8-25. https://doi.org/10.1116/1.585795

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