<  Back to the Polytechnique Montréal portal

Items where Author is "Paraszczak, J."

Up a level
Export as [feed] Atom [feed] RSS 1.0 [feed] RSS 2.0
Jump to: M
Number of items: 1.

M

Moisan, M., Barbeau, C., Claude, R., Ferreira, C. M., Margot, J., Paraszczak, J., Sá, A. B., Sauvé, G., & Wertheimer, M. R. (1991). Radio frequency or microwave plasma reactors? Factors determining the optimum frequency of operation. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, 9(1), 8-25. External link

List generated on: Fri Jul 10 09:22:56 2026 EDT