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Radio frequency or microwave plasma reactors? Factors determining the optimum frequency of operation

M. Moisan, C. Barbeau, R. Claude, C. M. Ferreira, J. Margot, J. Paraszczak, A. B. Sá, G. Sauvé and Michael R. Wertheimer

Article (1991)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/38195/
Journal Title: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena (vol. 9, no. 1)
Publisher: American Vacuum Society
DOI: 10.1116/1.585795
Official URL: https://doi.org/10.1116/1.585795
Date Deposited: 18 Apr 2023 15:26
Last Modified: 05 Apr 2024 11:32
Cite in APA 7: Moisan, M., Barbeau, C., Claude, R., Ferreira, C. M., Margot, J., Paraszczak, J., Sá, A. B., Sauvé, G., & Wertheimer, M. R. (1991). Radio frequency or microwave plasma reactors? Factors determining the optimum frequency of operation. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, 9(1), 8-25. https://doi.org/10.1116/1.585795

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