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Thermal Stress in Doped Silicate Glasses (B,P) Deposited by PECVD and LPCVD

H. Bouchard, A. Azelmad, John F. Currie, Michel Meunier, S. Blain and T. Darwall

Paper (1993)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/35705/
Conference Title: 1993 MRS Spring Meeting
Conference Location: San Francisco, CA
Conference Date(s): 1993-04-12 - 1993-04-16
Journal Title: MRS Proceedings (vol. 308)
Publisher: Materials Research Society
DOI: 10.1557/proc-308-63
Official URL: https://doi.org/10.1557/proc-308-63
Date Deposited: 18 Apr 2023 15:26
Last Modified: 05 Apr 2024 11:28
Cite in APA 7: Bouchard, H., Azelmad, A., Currie, J. F., Meunier, M., Blain, S., & Darwall, T. (1993, April). Thermal Stress in Doped Silicate Glasses (B,P) Deposited by PECVD and LPCVD [Paper]. 1993 MRS Spring Meeting, San Francisco, CA. Published in MRS Proceedings, 308. https://doi.org/10.1557/proc-308-63

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